Resistance change memory device

ABSTRACT

A resistance change memory device including: a semiconductor substrate; at least one cell array formed above the semiconductor substrate, each memory cell having a stack structure of a variable resistance element and an access element, the access element having such an off-state resistance value in a certain voltage range that is ten times or more as high as that in a select state; and a read/write circuit formed on the semiconductor substrate as underlying the cell array for data reading and writing, wherein the variable resistance element comprises a recording layer composed of a composite compound containing at least two types of cation elements, at least one type of the cation element being a transition element having “d” orbit, in which electrons are incompletely filled, the shortest distance between adjacent cation elements being 0.32 nm or less.

CROSS REFERENCE TO RELATED APPLICATION

This application is a Continuation-In-Part of application Ser. No. 10/548,291, filed on Sep. 1, 2005, which is based on PCT/JP2003/003257 and incorporated in its entirety by the reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to a resistance change memory device, which stores a resistance value determinable by a resistance change of memory material in a non-volatile manner.

2. Description of the Related Art

Recently, there have been proposed some memory devices having variable resistance elements. One of such the memory devices is known as a phase change memory which uses phase transition between an amorphous state and a crystalline state of a memory material (for example, U.S. Pat. No. 6,314,014B1). In such the phase change memory device, by controlling the current of a chalcogenide cell, reversible switching may be performed between a crystalline state (i.e. low resistance state) and an amorphous state (i.e. high resistance state). Apply a large current to a cell so as to cause the cell chalcogenide to be melted, then rapidly cool down it, and a low resistance state may be written. Anneal the chalcogenide in such a degree as to crystallize it without melting, and a high resistance state may be written. Therefore, it is possible to obtain an electrically rewritable non-volatile memory device.

Other programmable resistance memories have been proposed as including programmable resistances switchable between a low resistance state and a high resistance state by reversing the polarity of voltage application. One of these has an ion conductor formed of a chalcogenide containing metals (for example, U.S. Pat. No. 6,418,049B1), and another one has a polymer in which conductive particles are dispersed (for example, U.S. Pat. No. 6,072,716). In these memories, dendrite growth and retraction thereof in a solid by voltage application are used. In order to write a low resistance state into a cell, a voltage is applied between the anode and cathode of a cell in such a polarity that the anode is positive. As a result, a dendrite grows from the cathode to reach the anode, whereby the cell becomes to be a low resistance state. A reverse voltage application retracts the dendrite to cause the cell to be in a high resistance state. Such the resistance change is reversible, and the low resistance state and the high resistance state may be stored in a non-volatile manner.

It has been suggested that it is possible to achieve an electrically rewritable non-volatile memory with a high density by use of such the programmable resistance. However, there has not been proposed a detailed configuration of a cell array and a read/write circuit thereof. In order to achieve a practical non-volatile memory with a high density and a high performance, how to combine the programmable resistance with what kinds of switching devices for constituting a cell array, how to construct the read/write circuit in communication with the cell array, and the like become important technical issues.

SUMMARY OF THE INVENTION

A resistance change memory device in accordance with an aspect of the invention including:

a semiconductor substrate;

at least one cell array, in which memory cells are arranged, formed above the semiconductor substrate, each the memory cell having a stack structure of a variable resistance element and an access element, the variable resistance element storing a high resistance state or a low resistance state in a non-volatile manner, the access element having such an off-state resistance value in a certain voltage range that is ten times or more as high as that in a select state; and

a read/write circuit formed on the semiconductor substrate as underlying the cell array for data reading and data writing in communication with the cell array, wherein

the variable resistance element includes a recording layer composed of a composite compound containing at least two types of cation elements, at least one type of the cation element being a transition element having “d”-orbit, in which electrons are incompletely filled, the shortest distance between adjacent cation elements being 0.32 nm or less.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram for explaining the principle of data write for a programmable resistance memory element according to an embodiment of the present invention.

FIG. 2 is shows a basic cell array and a voltage application mode thereof for a selected cell according to the embodiment.

FIG. 3 shows another voltage application mode for the selected cell in the basic cell array.

FIG. 4 shows a read/write voltage relationship for a unit cell.

FIG. 5 shows a cell characteristic for explaining a write principle.

FIG. 6 shows a cell characteristic for explaining a read principle.

FIG. 7 shows a layout of a three-dimensional cell array according to the embodiment.

FIG. 8 is a sectional diagram as taken along line I-I′ of the three-dimensional cell array shown in FIG. 7.

FIG. 9 is a sectional diagram of another three-dimensional cell array.

FIG. 10 shows an equivalent circuit of the three-dimensional cell array.

FIG. 11 shows a resistance distribution of memory cells.

FIG. 12 shows a resistance distribution of the three-dimensional cell array according to the embodiment.

FIG. 13 shows a pair cell configuration method according to the embodiment.

FIG. 14 is a diagram showing operational wave forms for explanation of data read according to the embodiment.

FIG. 15 is a diagram showing operation wave forms for explanation of data write according to the embodiment.

FIG. 16 a diagram showing operation wave forms for explanation of data write for two pair cell in adjacent two cell arrays.

FIG. 17 shows another pair cell configuration method.

FIG. 18 is a perspective view showing a stack structure of the three-dimensional cell array and a read/write circuit thereof according to the embodiment.

FIG. 19 is a cross-sectional diagram showing the interconnection relationship between bit lines of the cell array and the read/write circuit.

FIG. 20 is a cross-sectional diagram showing the relationship between word lines and the read/write circuit.

FIG. 21 is a diagram showing a layout of the read/write circuit.

FIG. 22 is a diagram showing the word line select circuit portion of the read/write circuit.

FIG. 23 is a diagram showing the bit line select circuit portion of the read/write circuit.

FIG. 24 shows a main portion layout of the transistor circuit shown in FIGS. 22 and 23.

FIG. 25 is a perspective view of the cell array state after the bit line formation.

FIG. 26 is a perspective view of the cell array state after the memory cell formation on the bit lines.

FIG. 27 is a perspective view of the cell array state after the word line formation.

FIGS. 28A to 28C are cross-sectional views showing the word line forming process.

FIG. 29 is a diagram showing a variable resistance element in accordance with another embodiment.

FIG. 30 shows a preferable example of the element.

FIGS. 31A to 31C each shows an element structure with a heater layer(s) disposed.

FIGS. 32 to 40 show compound examples usable in this embodiment.

DETAILED DESCRIPTION OF THE EMBODIMENTS

FIG. 1 shows a principle configuration of a programmable resistance (variable resistance) VR used in the present invention. The programmable resistance VR is formed of a resistance film 3 as being a memory material, and cathode, anode electrodes 1, 2 that sandwiches the resistance film 3. The resistance film 3 is, for example, an ion conductor (solid electrolyte) formed of a chalcogenide containing metal ions such as silver, cupper and the like. For example, Ge—S, Ge—Se and the like may be used as the chalcogenide. When the resistance film 3 is formed of the above-described chalcogenide, the electrodes 1, 2 are also formed containing silver therein.

The resistance film 3 stores, for example, a high resistance state as a data “0” and a low resistance state as a data “1”. In this programmable resistance VR, apply a positive anode-cathode voltage (V_(AK)>0) that is over a threshold value, and a data “1” will be written. Apply a negative anode-cathode voltage (V_(AK)<0) that is over a threshold value, and a data “0” will be written. When “1” data is written, as a result of the voltage application of V_(AK)>0, a conductive dendrite 4 grows from the cathode electrode 1 toward the anode electrode 2 in the resistance film 3 as shown in FIG. 1. When the dendrite 4 reaches the anode electrode 2, the high resistance state (data “1”) is obtained. Apply a reverse voltage, and the dendrite 4 is retracted or broken, whereby the low resistance state (data “0”) is obtained. Such the low resistance state and the high resistance state may be statically held as far as a voltage is not applied over the threshold.

It should be appreciated that the resistance film 3 may be formed of a polymer in which conductive particles are dispersed (for example, carbon polymer in which carbon black particles are dispersed). In this case, a low resistance state and a high resistance state are reversibly written based on the same principle as above-described.

The principle of the above-described memory operation is based on a mechanism as described below. An ion conductor or a polymer is amorphous, and potential barriers are formed at random and statically therein. In addition, in the potential barrier distribution, potential valleys are formed continuously from the cathode to the anode. Disperse some kinds of metals in such a solid material, and it is possible to move metal ions along the potential valleys due to electric field application. When a voltage is applied in such a polarity that anode side is positive, metal ions move toward the cathode, and then metal dendrite grows from the cathode electrode. Reverse the polarity of the electric field, and the metals in the dendrite is charged and separated from the dendrite, then move toward the cathode along the potential valleys. As a result, the dendrite may be retracted.

Data read of such the programmable resistance VR may be performed by current monitoring when a voltage is applied to the programmable resistance VR with such a degree that dendrite growth and retraction thereof do not occur. Alternatively, it is possible to use a large read voltage without data disturbance in a condition that it has such a polarity as to accelerate the data “0”, “1” state.

FIG. 2 shows a basic cell array of a programmable resistance memory in accordance with an embodiment, with respect to a 3×3 cell matrix. A plurality of first wirings (hereinafter, bit lines BL) are provided in parallel, and a plurality of second wirings (hereinafter, word lines WL) are provided to cross the bit lines BL. Memory cells MC are laid out at the respective crossing points of these word lines WL and bit lines BL. The memory cell MC is a series-connection circuit of a programmable resistance VR and a Zener diode ZD. The anode of Zener diode ZD is connected to word lines WL.

In a non-select state, the bit lines BL are held at a high level voltage V_(H), and the word lines WL are held at a low level voltage V_(L). In this state, Zener diodes ZD are in a reverse-biases state and thus are in an off-state. FIG. 2 shows such a case that cell selection is performed by use of a forward-bias characteristic of the Zener diode ZD.

Therefore, in order to select a cell MC, which is surrounded by broken lines, let a selected word line WL at the high level voltage V_(H), and let a selected bit line BL at the low level voltage V_(L); whereby, at the selected cell, its diode ZD becomes forward-biased to be in an on-state, and a voltage is applied to one programmable resistance VR.

FIG. 3 shows such a case that a reverse bias is applied to the programmable resistance VR in the same cell array shown in FIG. 2. In this case, breakdown of the Zener diode ZD is used. Zener breakdown is generated by band to band tunnelling of the diode junction, and breakdown start voltage (Zener voltage) Vz may be controlled by the impurity concentration of the diode. As similar to FIG. 2, in a non-select state, the bit lines BL are held at a high level voltage V_(H), and the word lines WL are held at a low level voltage V_(L). In order to select a cell MC, which is surrounded by broken lines, let a selected word line WL at a low level voltage V_(LL) lower than V_(L), and let a selected bit line BL at a high level voltage V_(HH) higher than V_(H) (for example, V_(LL)=V_(L)−Δ, V_(HH)=V_(H)+Δ, where Δ is a voltage level variation); whereby, at the selected cell, a large backward bias is applied to the diode ZD, thereby causing it breakdown.

As a result, a voltage with a polarity opposite to that in FIG. 2 may be applied to one programmable resistance VR.

The above-described level relationship is an example. For example, in FIG. 2, although the non-selected bit lines and selected word line are set at the same high level voltage V_(H), and non-selected word lines and selected bit line are set at the same low level voltage V_(L), it is not necessary to use the same levels in these cases. With respect to the voltage variation Δ used in the select mode in FIG. 3, it is not necessary to use the same value for the bit line and word line.

In this embodiment, the cell selection method, in which the forward bias characteristic of the diode is used as shown in FIG. 2, is used for “0” data write and data read; and the cell selection method, in which the backward breakdown of the diode is used as shown in FIG. 3, is used for “1” data write. Giving attention to one memory cell, read and write characteristics will be described in detail, referring to FIGS. 4 and 5.

FIG. 4 shows a relationship between a read voltage Vr, a write voltage Vw and a voltage of Zener diode ZD. Programmable resistance VR is connected with such a polarity that anode (A) thereof is connected to the bit line BL. The read voltage Vr and write voltage Vw are ones between word line WL and bit line BL.

FIG. 5 shows characteristic changes of the programmable resistance VR in accordance with write operations by use of a voltage (V)-current (I) characteristic of the diode ZD and a V-I characteristic (i.e., load line) of the programmable resistance VR. In the first quadrant, a forward-bias characteristic curve 50 of the diode ZD is shown. This is expressed as follows; I=I₀{exp(qV/kT)−1}. The third quadrant shows backward-bias characteristic curves 51 a, 51 b of the diode ZD. In the non-select state, the voltage applied to the cell is V_(L)−V_(H), thus the diode ZD is held at a high-impedance off-state on the curve 51 a

In the first quadrant of FIG. 5, “0” write operation is performed as follows. Apply a write voltage Vw(0)=V_(H)−V_(L) in such a condition that Zener diode ZD becomes to be an on-state, and the cell held in a “1” data state (i.e., low resistive state) 53 is written into a “0” data state (i.e., high resistive state) 54. In principle, it is possible to use the first quadrant characteristic for “0” writing or for “1” writing.

However, since it is required to use this quadrant for cell data reading as described later, “0” write operation is performed in the first quadrant. This can be the in other words that the programmable resistance VR is connected with such a polarity that anode (A) thereof is connected to the bit kine BL in the cell array configuration shown in FIGS. 2 to 4. Corresponding with the write voltage application, a load line 53 of “1” data state changes to a load line 54 of “0” data state, as shown by an arrow, as a result of that the dendrite of the programmable resistance is retracted, and resistance value thereof becomes high.

In order to cause the programmable resistance of “1” data to take place such the change, it is required that a voltage higher than a certain level is applied to the programmable resistance. Such the level is shown as a “0” write threshold value VT in FIG. 5. VT is a voltage applied to the programmable resistance VR, and expressed as a negative voltage with reference to Vw(0). If the cross point B1 between the forward bias characteristic curve 50 of the Zener diode ZD and the load line 53 of “1” data state of the programmable resistance is positioned between the origin and Vw(0)−VT, “0” write may be done into the programmable resistance. As described above, use the first quadrant for “0” write, and it becomes hard to occur error write to the programmable resistance in a read mode. The reason of this will be described in detail later.

In the third quadrant, “1” write is performed. In this case, apply a large backward bias, and it may cause the Zener diode breakdown, and it allows of current flowing with an approximately constant voltage. In the drawing, “1” write operation is shown as follows; when write voltage Vw(1)=V_(LL)−V_(HH) is applied as being over the breakdown voltage (Zener voltage) Vz, the programmable resistance VR changes from a high resistive state 56 of “0” data to a low resistive state 55 of “1” data. Load lines 56, 55, which express “0”, “1” states respectively, have inclinations in correspondence with resistance values.

Therefore, these are in parallel with the load lines 53, 54 in the first quadrant, respectively. In this case, it is also required for successfully writing to the programmable resistance that a voltage higher than a threshold value VT is applied to it. If the cross point B2 between the breakdown characteristic curve 51 b of the Zener diode ZD and the load line 56 of “0” data state of the programmable resistance is positioned between the origin and Vw(1)+VT, “1” write may be done into the programmable resistance. Voltages V_(LL), V_(HH) and the like are selected in such a condition that sufficiently high voltage is applied to the programmable resistance.

If the resistance value of “1” data written programmable resistance is too low, a large current will flow through the Zener diode ZD, thereby causing it thermal breakdown. Therefore, it is required to give attention to the current value. Corresponding to some cases, it will be necessary to dispose a current limiter.

If the third quadrant is used for “0” writing, there is not any fear of thermal breakdown, because the load line variation due to writing is in such a direction that the current value decreases. In this case, however, since it is required to use the first quadrant for “1” writing, the possibility of erroneous writing in a read operation is undeniable.

In FIG. 5, voltage variations C1 to C3, which are applied to non-selected cells during selective writing operation for the cell array shown in FIGS. 2 and 3, are shown. C1 is a voltage variation of non-selected cells along the selected bit line and selected word line during “0” data writing shown in FIG. 2; C2 is a voltage variation of non-selected cells along the selected bit line and selected word line during “1” data writing shown in FIG. 3; and C3 is a voltage variation of non-selected cells along the selected bit line and selected word line in such cases that during a “1” writing operation for a cell as shown in FIG. 3, “0” writing is performed for another cell as shown in FIG. 2.

Such the cases are not used in the above-described write operation. It is required that these voltage variations C1 to C3 are insufficient to break data of the non-selected cells. Therefore, it is necessary for selecting the values of V_(H), V_(HH), V_(L) and V_(LL) in such a condition that the voltage variations do not cause the Zener diodes of the non-selected cells to be forward-biased to turn on, or do not cause those breakdown in the backward-bias direction.

FIG. 6 shows a characteristic of read operation which is performed by use of the first quadrant, with the “0” write characteristic (shown by broken lines). Since it is necessary to preform read operations with a low voltage necessary for preventing the cells from erroneous write, the read operations in accordance with this embodiment are performed in the first quadrant as similar to “0” write. For example, in a read mode, the high level voltage V_(H) is applied to a selected word line, and a low level voltage VLr, which is higher than V_(L), is applied to a selected bit line. At this time, detect a current difference or a voltage difference between crossing points S0 and S1 of the forward-biased characteristic curve 50 of the Zener diode and the load lines 58, 57 of “0”, “1” data by a sense amplifier, and read data may be determined.

In the above-described read operation, it is required to prevent the cell from erroneous write due to the read voltage application. As shown in FIG. 6, as far as that the voltage applied to the programmable resistance is set at lower than the threshold value VT in the “1” data read operation, no erroneous writes occur. In FIG. 6, in the “0” data read operation, a voltage slightly higher than the threshold value VT is applied to the programmable resistance. However, this becomes a “0” write mode. That is, a “0” read operation becomes as it is a “0” rewrite operation, thereby having nothing to do with erroneous write.

As previously described, it is possible to use the first quadrant for “1” data writing in principle. However, in such the case, a “0” read operation becomes a weak “1” write mode. To avoid such the mode, it is preferable to use the first quadrant for “0” write operations.

As described above, in the read scheme of FIG. 6, as far as that the crossing point S1 for “1” data reading is in the voltage range between Vr and Vr−VT, no erroneous writes occur. In other words, it is possible to set the read voltage Vr without considering the crossing point S0 for “0” data reading. Therefore, a sense margin and a sense speed may be improved. Supposing that the third quadrant is used for data read operation, since Zener voltage Vz is approximately constant, it is difficult to obtain a sense margin necessary for preventing the erroneous write.

As above-explained, in this embodiment, Zener diode is used as an access element for applying voltages to the programmable resistance in opposite polarities, whereby the forward bias characteristic and the backward bias breakdown characteristic thereof may be used. In the backward bias characteristic, there is a voltage region, in which a resistance value is regarded as being approximately infinite, under Zener voltage Vz.

This is an important characteristic required for the access element of the programmable resistance. In general, it is required of the access element to have such an off-state resistance value in a certain voltage range that is ten times or more as high as that in a select state.

In consideration of this, it should be appreciated that other access elements, for example, a PN junction diode, a Shottky diode and the like, may be used as far as that they are held in a high-resistive off-state in a certain voltage range.

So far, the configuration of the basic cell array and the principle of the data read/write operation have been explained. In this embodiment, a three-dimensional cell array structure in which a plurality of cell arrays are stacked above a semiconductor substrate is utilized. Such a three dimensional cell array will be explained below.

FIGS. 7 and 8 shows a layout and a cross section along I-I′ line thereof of a three-dimensional (3D) cell array including four-layer stacked cell arrays MA0 to MA3. In these figures, the same reference numerals are used at the same parts or components in the respective cell arrays, which numerals are distinguished between the cell arrays by addition of suffixes “a”, “b”, “c” and “d” thereto, and also distinguished between the shared portions of each two cell arrays by addition of suffixes “ab”, “bc” and “cd”.

A silicon substrate 10 is covered with an insulator film such as a silicon dioxide film. Above the substrate, a plurality of bit lines (BL) 12 a are arranged in parallel with each other. Pillar-type memory cells MC are arranged on each bit line 12 a at a certain pitch, each of which has a variable resistance element VR and a Zener diode ZD stacked thereon. Word lines (WL) 18 ab are formed to commonly connect the upper ends of the memory cells MC in a direction perpendicular to the bit lines 12 a, whereby first cell array MAO is formed.

As above-described, the variable resistance element VR is written into a “0” state by applying a high level voltage to the word line WL and a low level voltage to the bit line BL to cause it to be forward-biased. Therefore, the variable resistance element VR is disposed with such a polarity that anode and cathode thereof are to be connected to the word line WL and bit line BL, respectively. This is the same for every cell arrays stacked.

In detail, the memory cells MC are formed by patterning laminated layers having variable resistance element layer 13 a, an ohmic electrode 14 a, an n+-type silicon layer 15 a and a p+-type silicon layer 16 a. The variable resistance element layer 13 a is, as shown in FIG. 1, formed of an ion conductor containing a specified metal or a polymer sandwiched by anode and cathode electrodes. An interlayer dielectric film 17 is buried around the memory cells MC to planarize the cell array MA0.

Second cell array MA1 is formed to share the word lines (WL0) 18 ab with the first cell array MA0. In detail, pillar-type memory cells MC are arranged on each word line 18 ab at a certain pitch, each of which is formed by patterning the laminated films of an p+-type silicon film 16 b, an n+-type silicon film 15 b, an ohmic electrode 14 b and a variable resistance element film 13 b to have a stacked structure of a Zener diode ZD and a variable resistance element VR. The cell layout is the same as that of the first cell array MA0. Bit lines (BL1) 12 ab are patterned to commonly connect the variable resistance element layers 13 b arranged along a direction perpendicular to the word lines 18 ab. An interlayer dielectric film 19 is buried around the memory cells MC to planarize the cell array MA1.

The stacked structure of third and fourth cell arrays MA2 and MA3 is periodically formed as similar to the first and second cell arrays MA0 and MA1. Bit lines (BL1) 12 bc are shared with the second cell array MA1 and the third cell array MA2. The third cell array MA2 and the fourth cell array MA3 shares the word lines (WL1) 18 cd with each other. Bit lines (BL0) 12 a of the lowest cell array MA0 and bit lines (BL3) 12 d of the uppermost cell array MA3 are independently prepared, respectively. Although the cross section along II-II′ line of FIG. 7 is not shown, the memory cells MC are disposed on the continuously formed word lines WL at the same pitch as on the bit lines on this cross section.

As shown in FIG. 7, the bit lines BL and word lines WL of each cell array are formed with such a pattern that these are rotated by 90° each other, and memory cells MC are sandwiched therebetween at the respective crossing points. For example, the word lines WL and bit lines BL are formed with a line/space=1F/1F, where F is the minimum device feature size, thereby achieving the unit cell area of 4F2. In order to form such the structure, it is possible to use in the patterning process of the memory cells MC two exposures with an exposure mask used for patterning the word lines or the bit lines. In detail, in the lithography process for the laminated layers used for memory cells, exposures are performed at twice with an exposure mask in such a manner that the mask is rotated by 90° between the respective exposure steps. Then, etch the laminated layers so as to remain overlap portions at the two exposure steps, and it is able to dispose the memory cells MC at the respective crossing portions of the bit lines BL and the word lines WL.

In FIG. 8, the variable resistance element layers 13 are disposed only at the cross portions of the bit lines BL and the word lines WL. In contrast to this, in such a case that the leak current of the variable resistance element layer 13 is negligible small, the variable resistance element layer 13 may be remained without patterning, as shown in FIG. 9. In this case, the sandwiched portions between the diode ZD and the bit lines or the word lines within the variable resistance element layer 13 materially function as the variable resistance elements VR.

FIG. 10 shows a three-dimensional equivalent circuit of the 3D cell array formed as above-described. In order to prevent the bit lines from mutual interference, each two bit lines constitute a pair, and another bit line is disposed between the pair of bit lines. BL00, /BL00, BL01, /BL01, . . . are bit line pairs of the first cell array MA0; BL10, /BL10, BL11, /BL11, . . . are shared bit line pairs between the second and third cell array MA1 and MA2; and BL20, /BL20, BL21, /BL21, are shared bit line pairs between the third and fourth cell array MA2 and MA3. Further, WL0 (WL00, WL01, . . . ) are shared word lines between the first and second cell arrays MA0 and MA1; and WL1 (WL10, WL11, . . . ) are shared word lines between the third and fourth cell arrays MA2 and MA3.

In the above-described 3D cell array in which many memory cells are integrated, variation of cell characteristics gets into trouble. In detail, since the resistance value of the variable resistance element VR is determined by dendrite growth and retraction thereof, it is varied due to a history thereof, environment and the like.

FIG. 11 schematically shows a distribution of the resistance values of data “0”, “1”. If there is no overlap region, as shown in FIG. 11, between the resistance values of “0” and “1”, it is able to distinguish between “0” and “1” by use of a reference resistance Rref. However, in the 3D cell array that has numerous cells, it becomes difficult to set such the reference resistance Rref.

FIG. 12 schematically shows such a situation as above-described. Groups A, B, C and D include nearly disposed plural cells, respectively. Give attention to each the group, and it is able to set a reference resistance Rref. However, with respect to the entire of cell array, it becomes difficult or impossible.

In consideration of the above-described view points, in this embodiment, nearly disposed two cells constitute a pair cell for storing complementary data therein in such a manner that data “0” is stored in one cell and data “1” is stored in the other cell. Read operation is done by detecting the difference between cell currents of the two cells constituting a pair. By use of this scheme, even if there is a partial overlap between the high resistive state distribution and the low resistive distribution in the entire 3D cell array, it is possible to precisely read/write the cell data.

In FIG. 10, two cell pairs are typically shown as follows: two cells connected to a pair of bit lines BL00 and /BL00, respectively, with sharing a word line WL00 in the cell array MA0, being constituted to one pair cell, one of which is a true cell “T-cell0” and the other is a complementary cell “C-cell0”; and two cells connected to a pair of bit lines BL10 and /BL10, respectively, with sharing a word line WL10 in the cell array MA1, being constituted to another pair cell, one of which is a true cell T-cell and the other is a complementary cell C-cell. In every pairs of cells, a positive logic value of a binary data is stored in the true cell, and a negative logic value is stored in the complementary cell. Similar pair cells are selected in the cell arrays MA2 and MA3, too. In FIG. 10, cell currents at the respective read selection times are shown by arrows.

Data read/write methods in such the case that two memory cells constitute a pair cell will be described in detail bellow. FIG. 13 shows two pair cells in two cell arrays disposed adjacent up and down to have a shared word line WL. Data read operations for these two pair cells may be simultaneously performed by use of operation waveforms as shown in FIG. 14. In a non-select mode, V_(H)−V_(L) between the bit lines and the word lines is a hold voltage which holds the memory cells in such a non-select state that diodes thereof are backward-biased to be in a high resistive off-state.

In a read selection mode as shown in FIG. 14, a high level voltage V_(H) is applied to the word line WL which is held at a low level voltage V_(L) in a non-select time. At the same time, a low level voltage VLr (>V_(L)) is applied to the bit lines BL0, /BL0, BL1 and /BL1 which are held at high level voltage V_(H) in the non-select time. In other words, between the selected word line WL and the selected bit line pairs BL0, /BL0 and BL1, /BL1, a read voltage Vr=V_(H)−VLr is applied to forward-bias the selected cells. As a result, cell currents flow in the respective cells as above-explained with FIG. 6. Detect the cell current differences between the pair of bit lines BL0, /BL0, and between the pair of bit lines BL1, /BL1 by sense amps, and cell data of the respective pair cells may be determined. Since each pair cell is constituted by neighbouring two cells to store complementary data, it is possible to precisely sense the cell data.

Next, data write operations into pair cells will be described. Although a pair of cells store a data “0” in one cell and a data “1” in the other cell, “0” and “1” write voltages applied between the word line and the bit line have to be opposite each other as above-described. This means that it is impossible to simultaneously write data into the true cell, T-cell, and the complementary cell, C-cell, which share a word line. Therefore, it is required to perform data write operations for a pair cell at twice.

FIG. 15 shows waveforms of “0” data writing (i.e., T-cell=“0”, C-cell=“1”) and “1” data writing (i.e., T-cell=“1”, C-cell=“0”) into a pair cell. In order to write “0” data, with respect to the bit lines which are held at the high level voltage V_(H) in the non-select mode, a low level pulse voltage V_(L) is applied to one of bit line pair, BL0 (or BL1), and a high level pulse voltage V_(HH) higher than V_(H) is applied to the other, /BL0 (or /BL1). A high level voltage V_(H) is applied to the word line WL in the former half T1 of the above-described bit line selection period, and a low level voltage V_(LL) lower than V_(L) is applied to the same in the latter half T2.

As a result, in the former half T1, “0” write voltage, Vw(0)=V_(H)−V_(L), is applied to one cell, T-cell, of the pair cell to forward-bias the diode thereof due to the high level voltage V_(H) of the word line WL and the low level voltage V_(L) of the bit line BL0 (or BL1), whereby T-cell is written into a “0” data state. At this time, the voltage applied to the other cell, C-cell, is V_(H)−V_(HH). Since the diode of C-cell is held at an off-state in this condition, no error data are written into C-cell. In the latter half T2, “1” write voltage, Vw(1)=V_(LL)−V_(HH), is applied to the other cell, C-cell, of the pair cell to cause the diode thereof breakdown due to the low level voltage V_(LL) of the word line WL and the high level voltage V_(HH) of the bit line /BL0 (or /BL1), whereby C-cell is written into a “1” data state. At this time, the voltage applied to the cell T-cell, in which a data has been written, is V_(LL)−V_(L). Since the diode of T-cell is held at an off-state in this condition, no error data are written into T-cell.

In order to write “1” data, pull up one of bit line pair, BL0 (or BL1), to the higher level voltage V_(HH) from the high level voltage V_(H), and pull down the other, /BL0 (or /BL1), to the low level voltage V_(L) from the high level voltage V_(H). And, as similar to the “0” write mode, the high level voltage V_(H) is applied to the word line WL in the former half T1 of the above-described bit line selection period, and the low level voltage V_(LL) is applied to the same in the latter half T2. As a result, in the former half T1, one of the pair cell, C-cell, is written into a “0” data state because of that diode thereof is forward-biased due to the high level voltage V_(H) of the word line WL and the low level voltage V_(L) of the bit line BL0 (or BL1). In the latter half T2, the other cell, T-cell, is written into a “1” data state because of that the low level voltage V_(LL) of the word line WL and the high level voltage V_(HH) of the bit line /BL0 (or /BL1) cause diode thereof breakdown. No erroneous writes occur in both of the former half for “0” writing and the latter half for “1” writing, as similar to the above-described “0” writing mode.

As apparent from FIG. 15, “0”, “1” writing into a pair cell may be selected by reversing the voltages applied to the bit line pair, while the same voltage is applied to the word line. Therefore, it is able to perform simultaneous data writing into two pairs of cells with a shared word line.

FIG. 16 shows in detail waveforms of simultaneous data writing into two pair cells, (T-cell0, C-cell0) and (T-cell, C-cell), which are neighbouring up and down with a shared word line WL00. The data combinations of the two pair cells are expresses as four values “00”, “01”, “10” and “11”. Corresponding to the four values data, in FIG. 16, bit data of T-cell1, C-cell1, T-cell0 and C-cell0 are shown at upsides of the respective waveforms. To the respective bit line pairs, (BL00, /BL00), (BL10, /BL10), the high level voltage V_(HH) and the low level voltage V_(L) are applied in correspondence with to-be-written data. The voltages applied to the word line WL00 are changed all the same for the four data such that the high level voltage V_(H) and the low level voltage V_(L) are applied in the former half and the latter half respectively in the bit line selection period, as similar to that in FIG. 15. By use of such waveforms, two pair cells may be simultaneously written.

As apparent from the above-described write operations, it should be appreciated that it is possible to simultaneously access to the respective plural pair cells within the first and second cell arrays MA0 and MA1 with shared word lines. Similarly, it is possible to simultaneously access to the respective plural pair cells within the third and fourth cell arrays MA2 and MA3 with shared word lines.

In contrast to this, note that it is not allowed to simultaneously access to the second and third cell arrays MA1 and MA2 with shared bit lines.

Up to the present, it has been explained such a pair cell configuration that laterally neighbouring two memory cells constitute a pair cell in each cell array layer in the three-dimensional cell array. However, the pair cell configuration method is not limited this.

As shown in FIG. 17, it is possible to select vertically neighbouring two memory cells MC with a shared word line WL so as to constitute a pair cell (i.e., a true cell, T-cell, and a complementary cell, C-cell). In this case, the bit lines BL0, BL1 which belong to different cell arrays becomes a pair of bit lines to be connected to the pair cell.

FIG. 18 is a schematic perspective view showing a stacking state of cell blocks 100 and a read/write circuit 200 and interconnection relationships therebetween. Each the cell block 100 corresponds to the above-described 3D cell array with four layers.

A 3D cell array is, when necessary, divided into a plurality of cell blocks 100 with a predetermined capacity. In FIG. 18, two cell blocks 100 are arranged in a direction along the bit lines.

As shown in FIG. 18, the read/write circuit 200, which is used for data reading and writing in communication with the cell block 100, is underlain the cell block 100. The read/write circuit 200 is formed in such a state that main portion thereof is disposed within a rectangular cell layout region 210 defined on the substrate 10, above which the cell block 100 is stacked. The cell layout region 210 is defined by two boundaries A1 and A2 in the direction of the bit lines, and by two boundaries B1 and B2 in the direction of the word lines.

A group of bit lines BL0 of the first cell array MA0 and a group of bit lines BL2 of the fourth cell array MA3 are drawn to the first boundary A1 side to be connected to a bit line select circuit 201, which is disposed along the boundary A1 in the read/write circuit 200, through vertical wirings (i.e., passages that vertically run to the substrate) 101 that are disposed along the boundary A1. A group of bit lines BL1 shared by the second and third cell arrays MA1 and MA2 are drawn to the second boundary A2 side to be connected to another bit line select circuit 202, which is disposed along the boundary A2 in the read/write circuit 200, through vertical wirings 102 that are disposed along the second boundary A2.

The reason why the bit lines BL0 and BL2 are drawn to the same side to be commonly connected to the bit line select circuit 201 through the vertical wirings 101 is in such a fact that these groups of bit lines are not simultaneously activated. In detail, cell arrays MA0 and MA1 are simultaneously activated because of these have shared word lines WL0.

As similar to this, cell arrays MA2 and MA3 are simultaneously activated because of these have shared the word lines WL1. However, since the cell arrays MA1 and MA2 share the bit lines BL1, the lower cell arrays (MA1, MA2) and the upper cell arrays (MA2, MA3) are not activated simultaneously. The bit line select circuit 201, 202 include bit line decoders/multiplexers (BL-DEC/MUX).

The word lines WL0 and WL1 are drawn to the third boundary B1 side to be connected to word line select circuit 208, which is disposed along the boundary B1 in the read/write circuit 200, through vertical wirings 103 and 104, respectively, that are disposed along the boundary B1. The word line select circuit 208 has word line decoders/multiplexers (WL-DEC/MUX).

A central portion of the read/write circuit 200 serves as a global bus region 207, in which I/O data lines and pulse signal lines are disposed crossing this region in the direction of the word lines. Between this global bus region 207 and the bit line select circuits 201 and 202, disposed are sense amplifier arrays 203 and 204, respectively. Signal lines formed at the global bus region 207 are shared by the sense amplifier arrays 203 and 204.

The sense amplifiers in the sense amplifier arrays 203 and 204 are connected to bit line select circuits 201 and 202 through signal lines disposed at local bus regions 205 and 206, respectively. Therefore, some ones selected from the bit lines BL0 or BL2 by the bit line select circuit 201 are connected to the sense amp array 203. Similarly, some ones selected from the bit lines BL1 by the bit line select circuit 202 are connected to the sense amp array 204.

The I/O data lines and pulse signal lines disposed at the global bus region 207 are drawn to the fourth boundary B2 side of the cell layout region 210. Along this boundary B2, disposed is a write circuit (i.e., write pulse generator circuit) 209 for applying write pulse signals to selected bit lines.

As above-described referring to FIG. 18, bit lines and word lines of the cell arrays are connected to the read/write circuit 200 formed on the substrate 10 through the vertical wirings 101 to 104. Practically, these wirings 101 to 104 are formed of contact plugs buried in interlayer dielectric films formed surrounding the cell array.

The structural examples of the interconnections are shown in FIGS. 19 and 20. FIG. 19 shows a connection state between the bit lines and the read/write circuit 200 on a cross-section along the bit lines of the cell array. FIG. 20 shows a connection state between the word lines and the read/write circuit 200 on a cross-section along the word lines of the cell array.

As shown in FIGS. 19 and 20, the read/write circuit 200 has necessary transistors and metal interconnections formed on an interlayer dielectric film 11 a covering the transistors. The read/write circuit 200 is covered by an interlayer dielectric film 11 b, and the four layered cell arrays are formed thereon. Therefore, the interlayer dielectric films 11 a and 11 b constitute the insulator film 11 shown in FIGS. 8 and 9.

As shown in FIG. 19, the vertical wirings 101, which are used to connect the bit lines BL0, BL2 drawn toward the boundary A1 of the cell layout region 210 to the bit line select circuit 201, are composed of contact plugs 101 a to 101 e buried in the interlayer dielectric films 17, 19, 20 and 21. Similarly, the vertical wirings 102, which are used to connect the bit lines BL1 drawn toward the boundary A2 of the cell layout region to the bit line select circuit 202, are composed of contact plugs 102 a to 102 c buried in the interlayer dielectric films 11, 17 and 19.

As shown in FIG. 20, the vertical wirings 103, which are used to connect the word lines WL0 drawn toward the boundary B1 of the cell layout region to the word line select circuit 208, are composed of contact plugs 103 a and 103 b buried in the interlayer dielectric films 11 and 17. The vertical wirings 104, which are used to connect the word lines WL1 drawn toward the same side as the word lines WL0 to the word line select circuit 208, are composed of contact plugs 104 a to 104 d buried in the interlayer dielectric films 11, 17 and 20.

Although the lowest contact plugs 101 a, 102 a, 103 a and 104 a of the laminated cell arrays in FIGS. 19 and 20 are connected to metal wirings of the read/write circuit 200, it is possible to directly connect these to source/drain diffusion layers of transistors.

FIGS. 19 and 20 show an example in which the contact plugs are formed of metal films used for bit lines and word lines. The fabrication steps will be described later. Additionally, it is appreciated that the contact plugs may be formed of other metal films different from the bit lines and word lines or polycrystalline silicon films.

One cell block 100 shown in FIG. 18 includes, for example, 512 bit lines (BL) and 128 word lines (WL) for one cell array. As described above, two memory cells store one bit data in this embodiment. In this case, one cell block has a memory space of 256 columns (Col)×128 rows (Row). The memory capacity can be increased by increasing the number of cell blocks to be arranged. In order to achieve a high-speed access in such a large capacitive memory, it is necessary to perform parallel access for multi-bit data.

For example, in order to perform 32-bits parallel access, one cell block is to be divided into two parts in the word line direction, and into 32 parts in the bit line direction, whereby 64 cell units are obtained. As a result, each cell unit becomes to have a capacity of 3210×4Col×4 Row×4. On the global bus region 207, data lines and pulse signal lines are disposed for 6410 data input/output.

FIG. 21 shows a schematic layout of the read/write circuit 200 with respect to one cell block 100 shown in FIG. 18 in a case that the above-described cell block construction is used. On the word line select circuit (WL-DEC/MUX) 208 as been disposed at the right side in FIG. 21, disposed are row address (RA) signal lines 301, which vertically run for selecting one each (i.e., upper and lower ones) from 128×2 word lines in the cell block 100.

The write circuit 209 disposed at the left side in FIG. 21 output pulse signals with high level voltage V_(HH) and low level voltage V_(L) that are supplied to selected bit lines in a write mode (see FIG. 15). Write pulse signal lines (WP) 305 which transfer the write pulse signals are disposed as to laterally run on the global bus region 207. In parallel with the write pulse signal lines 305 on the global bus region 207, disposed are main data lines 304, on which read out data are transferred.

One cell unit is selected in one cell block, and cell data of lower two cell layers or upper two cell arrays in each cell unit are simultaneously activated. Therefore, data lines 304 are prepared for 32IO×2=64IO. The write pulse signal lines are the same.

In detail, in a read mode, read data on plural bit lines, which are respectively selected from the lower two cell arrays (MA0, MA1) or the upper two cell arrays (MA2, MA3) by the bit line select circuits 201 and 202, are simultaneously sensed by the sense amp arrays 203 and 204, and then simultaneously transferred to the data lines 304. In a write mode, write pulse signals, which are to be supplied to plural bit lines respectively selected from the lower two cell arrays (MA0, MA1) or the upper two cell arrays (MA2, MA3), are output to the write pulse signal lines 304 from the write circuit 209, and then transferred to the plural bit lines respectively selected by the bit line select circuits 201 and 202.

On the lower and upper ends of the read/write circuit 200, disposed are the bit line select circuits 201 and 202, respectively, and column address (CA) signal lines 302 and 303 are disposed to laterally run on the respective regions.

One of the bit line select circuits, i.e., circuit 201, selects 32 bit line pairs from 512 bit line pairs(=64IO×4 Col) in the upper two cell arrays, and the other selects 32 bit line pairs from 512 bit line pairs in the lower two cell arrays. Therefore, on the respective local bus regions 205 and 206, disposed are four pairs of current pass lines BP, /BP for commonly 4-columns (=8 bit lines) data as to cross the regions of sense amplifier arrays 203 and 204 for applying the pulse signals of the pulse signal lines 305 to bit lines selected by the respective bit line select circuits 201 and 202. Additionally, 64 pairs of local data lines DL, /DL for 4 columns data are disposed on the respective local bus regions 205 and 207, and these are connected to the respective sense amps in the sense amplifier arrays 203 and 204.

One circuit portion 310, that are to be connected to 4 Row×2 (=8 word lines) and another circuit portion 312, that are to be connected to 4 Col (=8 bit lines), each being surrounded by a broken line in FIG. 21, are shown in FIGS. 22 and 23, respectively, in detail.

Two multiplexers MUX0 and MUX1 have select gate circuits for selecting the lower word lines WL0 shared by the cell arrays MA0 and MA1, and the upper word lines WL1 shared by the cell arrays MA2 and MA3, respectively. Eight word lines input to the multiplexer MUX0 in FIG. 22 correspond to the word lines WL0 of the lower two cell arrays in FIG. 18.

Decoders DEC include decode gates G (G1, G2, . . . ) for selecting one of 32 cell units. The multiplexer MUX0 has a select gate circuit 401 composed of NMOS transistors QN (QN21 to QN24, QN25 to QN28, . . . ) that are driven by select signals S10 to S13 so as to select one from four word lines. These NMOS transistors QN21 to QN24 and QN25 to QN28 are commonly connected to nodes N11 and N12, respectively. To these nodes N11 and N12, applied is a word line drive signal Vwdrv output from a word line driver circuit 403 through self-boost transistors QN81 and QN82 which are selectively driven by the decode gates G1 and G2.

The word line drive signals Vwdrv is held at the high level voltage VH in the read mode (see FIG. 14), or at the high level voltage VH in the former half and the low level voltage VLL in the latter half in the write mode (see FIG. 15).

The gates of transistors QN81, QN81 are connected to the output nodes of the decode gates G11, G12 though NMOS transistors QN83, QN84 so as to be selectively charged at a high level by the outputs of the decode gates G11, G12. The word line drive signal Vwdrv is applied to a word line WL through on-state NMOS transistors QN81, QN82.

Since the NMOS transistors QN81, QN82 are configured as transfer gates which are to be self-boosted by capacitive coupling between gates and sources therebetween, the word line drive signal Vwdrv, which are changed between VH and VLL, is transferred to the word line WL without voltage drops.

The multiplexer MUX0 has a reset circuit 402 composed of NMOS transistors QN (QN11 to QN14, QN15 to QN18, . . . ) for holding non-selected word lines as being at low level voltage VL=Vss. The multiplexer MUX1 is composed as similar to the multiplexer MUX0.

A sense amp SA shown in FIG. 23 is one of 32 sense amps in the sense amp array 205 shown in FIG. 21. Four pairs of eight bit lines BL0, /BL0 to BL3, /BL3 connected to the sense amp SA are ones selected from the bit line group BL0 or BL2 shown in FIG. 10. As previously described, since the lower two cell arrays MA0 and MA1 and the upper two cell arrays MA2 and MA3 are not activated at a time, the sense amplifier SA is commonly used for the lower cell arrays MA0, MA1 and the upper cell arrays MA2, MA3.

The sense amplifier SA is a CMOS flip-flop type current sensing amplifier with an activating PMOS transistor QP30. Two nodes N1 and N2 thereof are directly connected to a pair of ones GBi, /GBi in the global data lines 304, respectively. Drains of sensing NMOS transistors QN61 and QN62 are selectively connected to data lines DL and /DL through NMOS transistors QN31 and QN32, respectively, that are controlled by a read control signal R to turn-on during a read operation. Except on the data read time, the nodes N1 and N2 are shorted with each other by an equalizing transistor QN73. Data lines DL, /DL are connected to a pair of bit lines selected by the bit line decoder/multiplexer BL-DEC/MUX.

Drains of the sensing transistors QN61, QN62 may be selectively set at Vss or at floating states by NMOS transistors QN71, QN72 which are controlled by a clock CLK. Based on the operations of transistors QN71, QN72, it is possible to apply the low level voltage VLr(=Vss) shown in the waveforms of FIG. 14 to selected bit lines and to perform a positive feed-back operation of the sense amp SA when cell data are transferred to NMOS transistors QN61, QN62 in a data sense time.

The bit line decoder/multiplexer BL-DEC/MUX has a select gate 403 composed of NMOS transistors QN51 to QN54, and Q55 to Q58 controlled by decoded signals S20 to S23 for selecting one pair from four pairs of bit lines to connect these to the data lines DL and /DL, respectively. Additionally, the bit line decoder/multiplexer BL-DEC/MUX has a reset circuit 404 composed of PMOS transistors QP51 to QP54, and QP55 to QP58 for holding non-selected bit lines as being at a high level of Vdd.

The pair of data lines DL, /DL are connected to a pair of signal lines WPi, /WPi in the pulse signal lines 305 through NMOS transistors QN41, QN42 that are driven by a write control signal W to turn-on, and through signal lines BP, /BP.

In the above-described configuration, when a data read operation is performed, word lines selected by select gate circuit 403 become “H”, and bit line pairs selected by select gate circuit 403 become “L”. At this time, cell currents from the selected complementary cells on the selected bit line pair are transferred to the drains of NMOS transistors QN61, QN62 of the sense amp SA through data lines DL, /DL and through NMOS transistors QN31, QN32. During this operation, NMOS transistors QN71, QN72 are held at an off-state.

Thereafter, clock CLK becomes “H” to turn-on the NMOS transistors QN71, QN72, whereby the drains of the sensing NMOS transistors QN61, QN62 are clamped at Vss. As a result, a differential voltage generated between the nodes N1 and N2 due to the difference of cell currents is positively feeded back to be amplified such that one of the nodes N1, N2 becomes Vdd, while the other becomes Vss. Amplified cell data as above-described is output to the main data lines GBi, /GBi.

In a data write mode, the drive signal Vwdrv, which is at the high level voltage V_(H) in the former half and at the low level voltage V_(L) in the latter half, is applied to a selected word line. Simultaneously, write pulse signals, which are set at combinations among V_(HH), V_(H), V_(L) and V_(LL) corresponding to-be-written data, are applied to selected pair cells through the write pulse signal lines WPi, /WPi, whereby data write operations are performed.

Since one word line is commonly connected to many pair cells, it is required for the word line to supply a large current to the pair cells. In consideration of such the current value, it is required to design drivability of the word line decoder, resistance of the word line itself, the transistor size, and the like. It should be appreciated that the word line multiplexer MUX0 for eight word lines shown in FIG. 22 and the bit line decoder/multiplexer DEC/MUX for eight bit lines shown in FIG. 23 have the same circuit configuration.

Therefore, these circuit regions may be achieved to have the same layout as shown in FIG. 24. In FIG. 24, transistors QN21 to QN28, QN11 to QN18, select signals S10 to S13, /S10 to /S13 and low level power supply (Vss) lines in the circuit of FIG. 22 are shown, and in correspondence to these, transistors QN51 to QN58, QP51 to QP58, select signals S20 to S23 and high level power supply (Vdd) lines in the circuit of FIG. 12 are shown parenthesized. Although there is such a situation that the respective transistors corresponding to each other are of different conductivity-types, it is possible to use the same layout for these circuits.

Vertically running wiring 410 in FIG. 24 are gate lines of transistors that serve as select lines and power supply lines of Vdd, Vss. These may be simultaneously formed by patterning a polysilicon film. Since power supply lines Vss, Vdd are merely required to be potentially fixed as necessary for holding non-selected bit lines and word lines as being not floating, it is not required that these are not very low resistive. Therefore, it is able to use for these lines the same polysilicon film used for gate electrodes.

Although laterally running wirings 411 are shown by schematic straight lines, these are metal wirings which are contacted to sources and drains of transistors. Contact portions 412 serve as to connect the metal wirings 411 to bit lines and word lines, to which the vertical interconnection lines (i.e., contact plugs) 101 to 104 shown in FIG. 18 are connected.

Bit lines and word lines in the above-described cell array are preferably formed with a line/space of 1F/1F (F: minimum device-feature size). These bit lines and word lines are connected while holding the line pitch to the read/write circuit 200 on the substrate as shown in FIG. 18. In this case, the metal wirings 411 shown in FIG. 24 are formed to have the same line/space of 1F/1F.

In contrast to this, transistors disposed on the way of the metal wirings 411 must have a large area necessary for supplying a required current. In consideration to this view point, in FIG. 13, each transistor is formed to have a gate width of three pitches of the metal wirings 411.

When the transistor size and metal wire pitch are determined as above-described, in order to effectively dispose the transistors, the select signal lines (S10, /S10)(S20), (S11, /S11)(S21), (S12, /S12)(S22) and (S13, /S13)(S23) which are suffixed in accordance with an address order of 0, 1, 2 and 3 are arranged in such an order of (S10, /S10)(S20), (S12, /S12)(S22), (S11, /S11)(S21) and (S13, /S13)(S23).

As a result, between a transistor array of QN21(QN51), QN23(QN53) selected by the select signal line S10(S20) and a transistor array of QN23(QN52), QN24(QN54) selected by the select signal line S11(S21), disposed is a transistor array of QN25(QN55), QN27(QN57) selected by the select signal line S12(S22). By employing such the transistor arrangement, it is possible to dispose transistors with a large size within a metal wiring area in which wirings are arranged at a small pitch without idle spaces.

Next, referring to FIGS. 25 to 27, it will be explained that the bit lines, word lines and contact portions thereof to the read/write circuit 200 are simultaneously formed by use of a dual damascene method.

FIG. 25 shows such a state that bit lines BL0 are formed on the interlayer dielectric film 11 covering the substrate 10 on which the read/write circuit 200 has been formed. Simultaneous with the formation of these bit lines BL0, formed are contact plugs 103 a, 104 a by a dual damascene process. These are used for connecting the word lines WL0, WL1 to be stacked thereon to the read/write circuit 200. Although not shown in FIG. 25, other contact plugs for connecting end portions of the bit lines BL0 to the read/write circuit 200 are formed simultaneously with the contact plugs 103 a, 104 a.

Then, as shown in FIG. 26, memory cells, each of which is constituted by a variable resistance element and a diode stacked each other, are formed on the bit lines BL0 at a predetermined pitch. Next, as shown in FIG. 27, interlayer dielectric film 17 is deposited to cover the memory cells MC, and then word lines WL0 are formed on the film 17 by a dual damascene process. In this process, contact plugs 103 b and 104 b, which are to be connected to the contact plugs 103 a and word lines WL1 to be formed next, respectively, are buried.

FIGS. 28A to 28C show the burying process of the word lines WL0 and contact plugs 103 b, 104 b in detail in a cross sectional view along the word line WL0 direction. FIG. 28A shows such a state that the interlayer dielectric film 17 is deposited to cover the memory cells MC and then planarized.

Thereafter, as shown in FIG. 28B, wiring-burying trenches 501 are formed in the interlayer dielectric film 17 by an RIE (Reactive Ion Etching) process for word line burying so as to expose the upper ends of the memory cells MC. Further, contact holes 502 are formed at the positions where the contact plugs 103 a, 104 a have been buried so as to be deeper than the trenches 501. Then, a wiring material metal layer is deposited and processed by a CMP (Chemical Mechanical Polishing) method. As a result, as shown in FIG. 28C, the word lines WL0 and the contact plugs 103 b, 104 b are simultaneously buried and formed.

Continuously, memory cell formations, interlayer dielectric film depositions, wiring and contact plug formations by use of the damascene method are periodically performed. By use of such processes, as shown in FIGS. 19 and 20, four-layered cell arrays may be stacked in such a manner that the bit lines and word lines of each layer is connected to the read/write circuit on the substrate.

Having described the embodiments of the present invention, other embodiments and variations will be apparent to those skilled in the art. Therefore, the invention should not be viewed as limited to the disclosed embodiments but rather should be viewed as limited only by the spirit and scope of the appended claims.

ADDITIONAL EMBODIMENT

Another embodiment will be explained below. The memory device according to an additional embodiment described below is a resistance change memory, which stores a high resistance state and a low resistance state as information data as similar to the above-described programmable resistance memory, and is referred to as a phase change memory in a wide sense. Therefore, the description in the above-described embodiment with reference to FIGS. 1 to 28C may be effective as it is in the embodiment described below with the exception of the recording layer's material and the recording mechanism explained with reference to FIG. 1.

A recording layer constituting a variable resistance element in this embodiment is formed of a composite compound containing at least two types of cation elements. At least one type of cation element is defined as a transition element, in the “d”-orbit of which electrons have been incompletely filled, and the shortest distance between adjacent two cation elements therein is defined to be 0.32 nm or less.

The transition element having the “d”-orbit, in which electrons have been incompletely filled, is, for example, Ti having univalent, bivalent or trivalent, Mn having one of univalent to sexivalent, Co having one of univalent to octvalent, or Ni having one of univalent to nanovalent.

The reason why the shortest distance between the adjacent cation elements is defined to be 0.32 nm or less is that the electron conductivity of the recording layer is improved.

In detail, the recording layer is composed of a transition metal oxide expressed by A_(x)M_(y)O₄, which has, for example, a spinel structure or a delafossite structure.

In this compound A_(x)M_(y)O₄, “A” is at least one element selected from the group consisting of Mg, Al, Mn, Fe, Co, Ni and Zn; and “M” is at least one element selected from the group consisting of V, Cr, Mn, Fe, Co and Ni.

It is required of elements “A” and “M” to be different from each other. Molar ratios “x” and “y” are selected to satisfy 0.1≦x≦2.2 and 1.8≦y≦2, respectively.

With the above-described element “A”, ion radius necessary to maintain a certain crystal structure is optimized, and a sufficiently high ion conductivity may be achieved. By use of the above-described element “M”, it becomes easy to control the electron state in a crystal layer.

The recording layer may be composed of another transition metal oxide expressed by A_(x)M_(y)O₃, which has, for example, an ilmenite structure. In this compound A_(x)M_(y)O₃, “A” is at least one element selected from the group consisting of Mg, Al, Mn, Fe, Co, Ni and Zn; and “M” is at least one element selected from the group consisting of V, Cr, Mn, Fe, Co and Ni.

“A” and “M” are elements that are different from each other. Molar ratios “x” and “y” are selected to satisfy 0.5≦x≦1.1 and 0.9≦y≦1, respectively.

With the above-described element “A”, ion radius necessary to maintain a certain crystal structure is optimized, and a sufficiently high ion conductivity may be achieved. By use of the above-described element “M”, it becomes easy to control the electron state in a crystal layer.

Further, the recording layer may be composed of another transition metal oxide expressed by A_(x)M_(y)O₄ with another crystal structure, e.g., a wolframite structure. In this compound A_(x)M_(y)O₄, “A” is at least one element selected from the group consisting of Mg, Al, Ga, Sb, Ti, Mn, Fe and Co; and “M” is at least one element selected from the group consisting of Cr, Mn, Mo and W.

“A” and “M” are elements that are different from each other. Molar ratios “x” and “y” are selected to satisfy 0.5≦x≦1.1 and 0.9≦y≦1, respectively.

With the above-described element “A”, ion radius necessary to maintain a certain crystal structure is optimized, and a sufficiently high ion conductivity may be achieved. By use of the above-described element “M”, it becomes easy to control the electron state in a crystal layer.

Crystalline structures employed as the recording layer are as follows:

Spinel structure

Cryptomelen structure

Ilmenite structure

Wolframite structure

Marokite structure

Hollandite structure

Heterolite structure

Ramsdelite structure

Olivine structure

Delafossite structure

α-NaFeO₂ structure

LiMoN₂ structure

In FIGS. 32 to 40, there are shown combination examples of elements together with circles with respect to typical compound examples usable in this embodiment. Specifically, preferable compounds in these examples are as follows; spinel type transition metal oxide (AM₂O₄); ilmenite type transition metal oxide (AMO₃); delafossite type transition metal oxide (AMO₂); LiMoN₂ type transition metal nitride (AMN₂); wolframite type transition metal oxide (AMO₄); and olivine type transition metal oxide (A₂MO₄).

FIG. 29 shows a variable resistance element (or unit) 500, in which the above-described composite compound is used as a recording layer 502. Recording layer 502 is sandwiched by electrode layers 501 and 503. The upper electrode 503 serves as a protect layer.

A small white cycle in the recording layer 502 denotes a typical element ion (movable ion, i.e., first cation, for example, Zn ion); and a small black cycle a transition element ion (second cation, for example, Mn ion). A large white cycle in the recording layer 502 denotes a negative ion, i.e., oxygen ion.

In this example, an initial state of the recording layer 502 is an insulator (high resistance state, i.e., stable state). Applying a potential gradient to the recording layer 502, it may be set to be in a conductive state (low resistance state).

Explaining in detail, apply voltage to the recording layer 502 in such a manner that the lower electrode 501 is relatively higher than the upper electrode 503. In case the lower electrode 501 is fixed in potential (e.g., ground potential), a negative voltage is applied to the upper electrode 503.

At this time, some of the first cations in the recording layer 502 move to the side of the upper electrode 503, and cation ions in the recording layer 502 relatively decrease in comparison with negative ions. The cations, which reached the electrode 503, receive electrons from the electrode 503 to be deposited as a metal layer 504 (set operation).

As a result of that the negative ions become excessive in the recording layer 502, the valence number of the transition elements contained in the recording layer 502 is increased. In other words, the recording layer 502 has a high electron conductivity (i.e., low resistance state).

The above-described set process is a kind of electrophoresis. Therefore, it is possible to consider that an oxidizing agent is generated due to electrochemical oxidization at the side of the electrode (i.e., anode) 501 while a reducing agent is generated by electrochemical reduction at the side of the electrode (i.e., cathode) 503.

To restore the recording layer 502 from the recorded state (low resistance state) to the initial state (high resistance state), for example, a large current pulse is applied to the recording layer. With this current application, the recording layer is Joule-heated and oxidization-reduction reaction thereof is accelerated. As a result, the recording layer 502 is restored to the insulator state due to the residual heat after interruption of the mass current pulse (reset operation).

Data defined by the high resistance state and the low resistance state may be read in such a manner as to supply a current pulse to the recording layer 502 and detect the resistance value thereof. It should be noted here that it is required of the current pulse used at a read time to be too small to cause resistance change of the recording layer 502.

The above-described “set” and “reset” may defined as: one of them is “write”; and the other “erase”.

To achieve the above-described operation principle in practice, it should be confirmed that no reset operation occurs at room temperature (i.e., retention time is sufficiently long); and power consumption of the reset operation is sufficiently small.

The former condition can be achieved by setting the valence number of positive ion to be equal to or greater than dihydric. The latter condition will be satisfied by finding out an ion radius and a moving path of the positive ion moving in the recording layer 502. As such the recording layer 502, above-described elements and crystal structures may be employed.

In the meantime, the oxidization agent is generated at the side of the electrode (anode) 501 after the reset operation. For this reason, it is preferable that the electrode 501 is composed of hardly oxidized material (for example, such as electrically conductive nitride or electrically conductive oxide). In addition, it is desired that an electrode material has no ion conductivity.

Examples of such a material include the following materials. Among them, LaNiO₃ is the most preferable material in view of comprehensive performance considering good electrical conductivity or the like.

MN

In the formula, “M” is at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb and Ta; and “N” is nitrogen.

MO_(x)

In the formula, “M” is at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Ir, Os and Pt; and “O” is oxygen. The molecular ratio “x” is set to satisfy 1≦x≦4.

AMO₃

In the formula, “A” is at least one element selected from the group consisting of La, K, Ca, Sr, Ba and Ln; “M” is at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, Re, W, Ir, Os and Pt; and “O” is oxygen.

A₂MO₄

In the formula, “A” is at least one element selected from the group consisting of K, Ca, Sr, Ba, and Ln; “M” is at least one element selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Ir, Os and Pt; and “O” is oxygen.

The reducing agent is produced at the side of the upper electrode (serving as a cathode and a protect layer) 503 after the reset operation has been performed. Therefore, it is preferable that the electrode 503 has a function of preventing the recording layer 502 from reacting with atmospheric air.

Examples of such a material include a semiconductor made of amorphous carbon, diamond-like carbon, SnO₂ and the like.

A protective layer may also be employed in place of the electrode 503. In this case, the protective layer is formed of an insulator or conductive material.

FIG. 30 shows a preferable electrode structure of the memory element, the recording layer of which is a spinel type compound. Each of electrodes 501 and 503 is formed of a W film and a TiN film interposed between the W film and the recording layer 502.

In case the recording layer 502 has a spinel structure, it is preferable to employ (110)-oriented one. The W film may be formed as (110)-oriented one by selecting the deposition condition. Sequentially depositing TiN film, recording layer, TiN film and W film on the (110) W film, it is possible to make the recording layer having a (110) spinel structure.

To efficiently carry out heating of the recording layer 502 in the reset operation, for example as shown in FIG. 31A, it is preferable to provide a heater layer 505 with a resistivity of 10⁻⁵/Ω-cm or more at the side of upper electrode 503. Alternatively, such the heater layer 505 can also be disposed at the side of the lower electrode 501 as shown in FIG. 31B. Further, as shown in FIG. 31C, heater layers 505 a and 505 b may be formed at the sides of the electrodes 501 and 503, respectively.

These heater layers 505, 505 a, 505 b may be preferably formed of a thin and high-resistive film of the same kind of compound as the recording layer 502.

In addition, it is permissible that the TiN film shown in FIG. 30 serves as the heater layer as described above.

Further, the recording layer 502 may possess a plurality of microstructures that have in common a continuous crystalline path between the electrodes 501 and 503 in at least a part of the recording layer 502. The recording layer may consist of a single-crystal film containing no grain boundary or a crystal film, the grain size of which is smaller than the lateral size of a memory cell.

A polycrystalline or amorphous film may also be used as the recording layer 502 if the film contains at least one columnar crystalline region that forms a continuous crystalline path between the electrodes. This embodiment remains effective regardless of the way in which the crystalline path between the electrodes 501 and 503 is formed. The recording layer 502 may, for example, be deposited during device manufacture in an amorphous or nanocrystalline form, and the columnar crystalline region is formed by local Joule heating during an initial forming stage of the device under a suitable bias current. As a result, the set/reset operation described above will be achieved by use of the cation movement in the crystalline regions of the recording layer 502. 

1. A resistance change memory device comprising: a semiconductor substrate; at least one cell array, in which memory cells are arranged, formed above the semiconductor substrate, each the memory cell having a stack structure of a variable resistance element and an access element, the variable resistance element storing a high resistance state or a low resistance state in a non-volatile manner, the access element having such an off-state resistance value in a certain voltage range that is ten times or more as high as that in a select state; and a read/write circuit formed on the semiconductor substrate as underlying the cell array for data reading and data writing in communication with the cell array, wherein the variable resistance element comprises a recording layer composed of a composite compound containing at least two types of cation elements, at least one type of the cation element being a transition element having “d”-orbit, in which electrons are incompletely filled, the shortest distance between adjacent cation elements being 0.32 nm or less.
 2. The resistance change memory device according to claim 1, wherein the recording layer is composed of one composite compound expressed by A_(x)M_(y)O_(z) (where A and M are elements different from each other) and selected from the group consisting of: a spinel type transition metal oxide; a delafossite type transition metal oxide; an ilmenite type transition metal oxide; a wolframite type transition metal oxide; a hollandite type transition metal oxide; a heterolite type transition metal oxide; a ramsdelite type transition metal oxide; and a olivine type transition oxide.
 3. The resistance change memory device according to claim 1, wherein the access element is a diode selected from a Zener diode, a PN junction diode and a Shottky diode.
 4. The resistance change memory device according to claim 1, wherein the cell array comprises: a plurality of bit lines arranged in parallel with each other; memory cells arranged on the respective bit lines at a certain pitch. a plurality of word lines each formed to commonly connect the upper ends of the memory cells in such a direction as crossing the bit lines.
 5. The resistance change memory device according to claim 4, wherein the variable resistance element and the diode serving as the access element of each the memory cell are stacked between the bit lines and the word lines.
 6. The resistance change memory device according to claim 5, wherein a plurality of cell arrays are stacked in such a manner that at least one of the bit lines and word lines are shared with adjacent two cell arrays.
 7. The resistance change memory device according to claim 6, further comprising: first and second vertical wirings disposed outside of first and second boundaries that define a cell layout region of the cell arrays in the direction of the bit lines to connect the bit lines of the respective cell arrays to the read/write circuit; and third vertical wirings disposed outside of one of third and fourth boundaries that define the cell layout region in the direction of the word lines to connect the word lines of the respective cell arrays to the read/write circuit.
 8. The resistance change memory device according to claim 7, wherein the first to third wirings are formed of contact plugs which are buried in an insulator layer formed to surround the cell arrays.
 9. The resistance change memory device according to claim 3, wherein the read/write circuit is configured to apply such a first write voltage to a selected one of the memory cells as to cause a diode thereof serving as the access element forward bias, thereby setting a variable resistance element thereof at a low resistance state, and to apply such a second write voltage with a polarity opposite to the first write voltage to a selected one of the memory cell as to cause a diode thereof serving as the access element breakdown, thereby setting a variable resistance element thereof at a high resistance state.
 10. The resistance change memory device according to claim 9, wherein the read/write circuit is configured to apply such a read voltage lower than the first write voltage to a selected one of the memory cells as to make diode thereof forward-biased, thereby detecting a data sate of a variable resistance element thereof.
 11. The resistance change memory device according to claim 5, wherein the read/write circuit is configured to apply such a first write voltage to a selected one of the memory cells through a selected bit line and a selected word line as to make diode thereof forward-biased, thereby setting a variable resistance element thereof at a low resistance state, and to apply such a second write voltage with a polarity opposite to the first write voltage to a selected one of the memory cells through a selected bit line and a selected word line as to make diode thereof breakdown, thereby setting a variable resistance element thereof at a high resistance state.
 12. The resistance change memory device according to claim 11, wherein the read/write circuit is configured to apply such a read voltage lower than the first write voltage to a selected one of the memory cells through a selected bit line and a selected word line as to make diode thereof forward-biased, thereby detecting a data sate of a variable resistance element thereof.
 13. The resistance change memory device according to claim 12, wherein the read/write circuit is configured to apply such a hold voltage between the bit lines and word lines in a non-select state as to keep the diodes of the memory cells at a high impedance off-state with a reverse bias.
 14. The resistance change memory device according to claim 6, wherein neighbouring two memory cells in each the plurality of cell arrays constitute a pair cell for storing complementary data, one of which is a high resistance state, and the other is a low resistance state, and wherein the complementary data of the pair cell are read out to a bit line pair as one bit of data.
 15. The resistance change memory device according to claim 14, wherein two memory cells constituting the pair cell are laterally neighbouring in each of the plurality of cell arrays in such a manner that anodes of diodes thereof are commonly connected to one of the word lines and anodes of variable resistance elements thereof are connected to a pair of bit lines.
 16. The resistance change memory device according to claim 15, wherein the pair cell is selected in such a condition that another bit line is disposed between the pair of bit lines to which the complementary data are read out.
 17. The resistance change memory device according to claim 14, wherein two memory cells constituting the pair cell are vertically neighbouring between neighbouring two cell arrays in the plurality of cell arrays in such a manner that anodes of diodes thereof are commonly connected to one of the word lines shared by the two cell arrays, and anodes of variable resistance elements thereof are connected to bit lines disposed at the two cell arrays, respectively.
 18. The resistance change memory device according to claim 7, wherein the read/write circuit comprises: a global bus region having a plurality of data lines to which read data are transferred and a plurality of write pulse signal lines for transferring write pulse signals to the bit lines, the data lines and the write pulse signal lines being so disposed as to cross a central portion of the cell layout region in the direction of the bit lines; first and second bit line select circuits disposed along the first and second boundaries of the cell layout region, respectively, to which the respective bit lines of neighboring two cell arrays are connected; first and second sense amp arrays for sensing data of bit lines selected by the first and second bit line select circuits, respectively, the first and second sense amp arrays being disposed between the first, second bit line select circuits and the global bus region, respectively; a word line select circuit disposed along one of the third and fourth boundaries of the cell layout region, to which shared word lines of the neighboring two cell arrays are connected; and a write circuit disposed along the other of the third and fourth boundaries of the cell layout region for generating the write pulse signals supplied to the write pulse signal lines.
 19. The resistance change memory device according to claim 18, wherein the shared word lines are simultaneously activated for a certain range which is selected by the word line select circuit, and the respective bit lines of the neighboring two cell arrays are simultaneously selected for the respective certain ranges which are selected by the first and second bit line select circuits, respectively, thereby simultaneously accessing to the respective plural memory cells in the neighboring two cell arrays.
 20. The resistance change memory device according to claim 19, wherein the first and second sense amp arrays have sense amps for simultaneously sensing data of the respective plural memory cells which are simultaneously selected in the neighboring two cell arrays, sensed data of which are simultaneously transferred to the data lines in the global bus region.
 21. The resistance change memory device according to claim 19, wherein the write circuit is configured to simultaneously output write pulse signals, which are to be transferred to the respective plural bit lines simultaneously selected in the neighboring two cell arrays, to the write pulse signal lines in the global bus region.
 22. The resistance change memory device according to claim 18, wherein neighbouring two memory cells in each the cell array constitute a pair cell for storing complementary data, one of which is a high resistance state and the other is a low resistance state, and wherein each of the first and second sense amp arrays comprises differential type current sensing amplifiers arranged therein, each of the current sensing amplifiers being connected to a bit line pair to which the pair cell is connected for sensing a current difference due to the complementary data. 